References:
: Offers the 1983 edition and 1988 edition for free digital borrowing. vlsi technology by sm sze pdf hot
This is arguably the "hottest" section for MEMS and 3D NAND engineers. Understanding Low-Pressure Chemical Vapor Deposition (LPCVD) and Plasma-Enhanced CVD (PECVD) starts here. References: : Offers the 1983 edition and 1988